Yulianto, Nursidik and Refino, Andam Deatama and Syring, Alina and Majid, Nurhalis and Mariana, Shinta and Schnell, Patrick and Wahyuono, Ruri Agung and Triyana, Kuwat and Meierhofer, Florian and Daum, Winfried and Abdi, Fatwa F. and Voss, Tobias and Wasisto, Hutomo Suryo and Waag, Andreas (2021) Wafer-scale transfer route for top–down III-nitride nanowire LED arrays based on the femtosecond laser lift-off technique. Microsystems and Nanoengineering, 7 (1). ISSN 20557434
Full text not available from this repository. (Request a copy)Abstract
The integration of gallium nitride (GaN) nanowire light-emitting diodes (nanoLEDs) on flexible substrates offers opportunities for applications beyond rigid solid-state lighting (e.g., for wearable optoelectronics and bendable inorganic displays). Here, we report on a fast physical transfer route based on femtosecond laser lift-off (fs-LLO) to realize wafer-scale top–down GaN nanoLED arrays on unconventional platforms. Combined with photolithography and hybrid etching processes, we successfully transferred GaN blue nanoLEDs from a full two-inch sapphire substrate onto a flexible copper (Cu) foil with a high nanowire density (~107 wires/cm2), transfer yield (~99.5), and reproducibility. Various nanoanalytical measurements were conducted to evaluate the performance and limitations of the fs-LLO technique as well as to gain insights into physical material properties such as strain relaxation and assess the maturity of the transfer process. This work could enable the easy recycling of native growth substrates and inspire the development of large-scale hybrid GaN nanowire optoelectronic devices by solely employing standard epitaxial LED wafers (i.e., customized LED wafers with additional embedded sacrificial materials and a complicated growth process are not required). © 2021, The Author(s).
Item Type: | Article |
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Additional Information: | Cited by: 34; All Open Access, Gold Open Access |
Uncontrolled Keywords: | Etching; Flexible displays; Gallium nitride; Hybrid materials; III-V semiconductors; Light emitting diodes; Nanowires; Nitrides; Sapphire; Substrates; Flexible substrate; Gallium nitride nanowires; Growth substrates; Laser lift-off techniques; Reproducibilities; Sacrificial material; Sapphire substrates; Solid state lighting; Femtosecond lasers |
Subjects: | Q Science > QC Physics |
Divisions: | Faculty of Mathematics and Natural Sciences > Physics Department |
Depositing User: | Sri JUNANDI |
Date Deposited: | 30 Oct 2024 01:46 |
Last Modified: | 30 Oct 2024 01:46 |
URI: | https://ir.lib.ugm.ac.id/id/eprint/8441 |