Semiconducting Indium Oxide Sensor for Oxygen Detection

Industrialization produces detrimental effects for the environment, one of which is polluting the air that we breath in. To monitor the quality of air, we proposed the fabrication of semiconducting metal oxide based gas sensor. Indium oxide materials were investigated for oxygen sensing in dry environment. The sensing materials were deposited onto alumina sensor substrates in 2 steps which is spin coating of the sensing material followed by a photolithographic process to define the sensing area. The sensors were tested in temperature ranging from 200-250°C and showed a good response to oxygen with the highest performance observed at 300°C (Rg/Ra = 5.5). In this work, we evaluated the effect of annealing temperature and operating performance on sensors performance. © 2021 IEEE.